| abstract |
The object of the present invention is to provide a kind of can being used as sputtering target or evaporation tablet and the Zn-Sn-O system oxidate sintered body being difficult to crack in film forming etc. and manufacture method thereof.The feature of above-mentioned oxidate sintered body is, it contains with the atomicity of Sn/ (Zn+Sn) than the tin counting 0.01 ~ 0.6, and the average crystallite particle diameter in sintered compact is less than 4.5 μm, and by based on the Zn using CuK Alpha-ray X-ray diffractionn 2 snOn 4 (222) face of phase, the integrated intensity in (400) face are set to I respectivelyn (222) , In (400) time, with In (222) / [In (222) + In (400) ] orientation degree that represents is more than 0.52.Because this oxidate sintered body physical strength is improved, so be difficult to cause breakage when processing sintered compact, and when using as sputtering target or evaporation tablet, be also difficult in the film forming of nesa coating, cause the breakage of sintered compact, the generation of crackle. |