http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103717706-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate | 2012-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103717706-B |
| titleOfInvention | For the perfluorinated alkyl sulfonamide tensio-active agent of photo-resist irrigation solution |
| abstract | Make a method for the surface modification of photo anti-corrosion agent material, it comprises and described photo anti-corrosion agent material is exposed to aqueous nonionic surfactant solution and changes the pH of described aqueous nonionic surfactant solution until fluorochemical layer is formed in described photo anti-corrosion agent material or on described photo anti-corrosion agent material.Described aqueous nonionic surfactant solution comprises the perfluorinated alkyl sulfonamide of following formula: Rn f sOn 2 nH-R ' is R whereinn f =Cn n fn 2n+1 -, and n=1 to 6, R '=-H ,-CHn 3 with-CHn 2 cHn 2 oH.Described aqueous nonionic surfactant solution has the pH in about 3pH unit perfluorinated alkyl sulfonamide pKa. |
| priorityDate | 2011-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.