http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103650116-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2012-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103650116-B |
| titleOfInvention | Substrate freeze-drying apparatus and method |
| abstract | The present invention provides an apparatus for freeze-drying a substrate. A chamber containing a substrate is provided. An electrostatic chuck (ESC) for supporting and electrostatically clamping the substrate is located in the chamber. A temperature controller controls the temperature of the electrostatic chuck. A condenser is connected to the chamber. A vacuum pump is fluidly connected to the chamber. |
| priorityDate | 2011-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.