http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103617951-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M175-0033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M175-0016 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2013-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103617951-B |
| titleOfInvention | A kind of method for purifying silicon wafer cutting waste fluid |
| abstract | The invention discloses a kind of method for purifying silicon wafer cutting waste fluid, comprise the following steps: give up the difference of cutting liquid content in cutting liquid according to silicon chip, adding coolant-temperature gage is the steam condensate (SC) of 30 50 DEG C, and the mass percent of preparation cutting liquid is total treatment fluid of 35% 45%；Being subsequently adding auxiliary agent, after stirring, squeeze into equipment for separating liquid from solid by pneumatic diaphragm pump and carry out solid-liquid separation, the filter cake obtained by equipment for separating liquid from solid and residue steam condensate (SC) are cleaned, and dry up by compressed air, are so repeated several times；The liquid obtaining solid-liquid separation evaporates contained most of moisture by distilling apparatus, and evaporating temperature controls at 80 130 DEG C, and evaporation time is 100 120min, obtains being mainly composed of the recovery cutting liquid of Polyethylene Glycol.The present invention improves the response rate and the organic efficiency reclaiming cutting liquid, and then decreases the waste of resource；Improve the performance reclaiming cutting liquid, be more beneficial for the cutting processing of silicon chip. |
| priorityDate | 2013-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.