| abstract |
The invention relates to a polybranch quaternary ammonium salt compound and its preparation and application. The multi-branched quaternary ammonium compound has the structure shown in formula I. The multi-branched quaternary ammonium salt compound of the present invention can be used as a leveling agent for copper electroplating using acidic copper sulfate as an electroplating solution. In formula I, R 1 is a C 1 -C 15 straight chain or branched chain alkyl group or a C 4 -C 12 straight chain or branched chain perfluoroalkyl group, and R 2 is a C 1 -C 8 straight chain or branched chain alkyl group , X is Cl, Br or I, M is H, Na or K, and n is an integer of 2-8. |