http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103579315-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 2012-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103579315-B |
| titleOfInvention | Semiconductor device and its manufacture method |
| abstract | The invention discloses a kind of semiconductor device, including：Multiple fins, on substrate and extend in a first direction；Multiple gate stack structures, extend and span each fin in a second direction；Multiple stressor layers, in the fin of gate stack structure both sides, and have multiple source-drain areas in stressor layers；Multiple channel regions, are located between multiple source-drain areas in the first direction；It is characterized in that, multiple gate stack structures cinctures enclose multiple channel regions.According to semiconductor device and its manufacture method of the present invention, corrode the fin at channel region place with reference to break-through and be formed self-aligned loopful around nano wire metal multiple-grid using hard mask and false grid, enhanced device performance. |
| priorityDate | 2012-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.