| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3221 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-36 |
| filingDate |
2012-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-103545351-B |
| titleOfInvention |
Semiconductor device and manufacturing method thereof |
| abstract |
The present invention provides a semiconductor device having a dummy active region for accumulating metal ions and capable of preventing device failure due to metal ion contamination and a manufacturing method thereof. The semiconductor device includes: an active region defined by an isolation layer in a semiconductor substrate and implanted with impurities by an ion implantation method; and a dummy active region implanted with impurities by an ion implantation method, wherein the dummy active region is implanted with impurities The concentration of the impurities is higher than that of the impurities in the active region, and the dummy active region is configured to accumulate metal ions. |
| priorityDate |
2012-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |