| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f96aa5fb688ac46af62a9c8bbdc3e970 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02854
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0237 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B17-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-09 |
| filingDate |
2012-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47ad2fda1855ddfd5fd4a84a20913522 |
| publicationDate |
2014-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-103534553-A |
| titleOfInvention |
Method of determining multilayer thin film deposition on a piezoelectric crystal |
| abstract |
A method for accurately calculating the thickness of deposited thin film layers onto a piezoelectric crystal blank in which dissimilar materials can be utilized, enabling determinations for various applications employing exotic materials. Additionally, the specific acoustic impedance (or equivalent z-ratio) of an unknown deposited material can be determined. The exact analytical solution nearly eliminates thickness errors when several layers of different materials are sequentially deposited on the same monitor quartz crystal, |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105758347-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105758347-A |
| priorityDate |
2011-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |