http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103531448-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87265 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4558 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2009-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103531448-B |
| titleOfInvention | Equipment for ald |
| abstract | The embodiment provides for such as plasma enhancing ALD(PE ALD) the equipment of ald (ALD).In one embodiment, provide lotus nozzle assembly, it includes lotus nozzle plate, this lotus nozzle plate has upper surface, lower surface, the radius extended to outward flange from the center of lotus nozzle plate, with more than first hole of upper and lower surface fluid communication and with more than second hole of upper and lower surface fluid communication, more than first hole is positioned at first area, first area extends to about the 25% of the radius of lotus nozzle plate from the center of lotus nozzle plate, and each hole has the diameter less than 0.1 inch, more than second hole is positioned at second area, second area is from about the 25% of the radius of the lotus nozzle plate outward flange extending to about lotus nozzle plate, and each hole has the diameter more than 0.1 inch. |
| priorityDate | 2008-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 77.