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filingDate 2012-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2015-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-103518004-B
titleOfInvention In-Ga-Zn system oxide sputtering target and manufacture method thereof
abstract A kind of sputtering target, it contains oxide compound A and InGaZnOn 4 , described oxide compound A in 2 θ=7.0 ° ~ the region A ~ K of 8.4 °, 30.6 ° ~ 32.0 °, 33.8 ° ~ 35.8 °, 53.5 ° ~ 56.5 °, 56.5 ° ~ 59.5 °, 14.8 ° ~ 16.2 °, 22.3 ° ~ 24.3 °, 32.2 ° ~ 34.2 °, 43.1 ° ~ 46.1 °, 46.2 ° ~ 49.2 ° and 62.7 ° ~ 66.7 ° has diffraction peak.
priorityDate 2011-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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