abstract |
A kind of sputtering target, it contains oxide compound A and InGaZnOn 4 , described oxide compound A in 2 θ=7.0 ° ~ the region A ~ K of 8.4 °, 30.6 ° ~ 32.0 °, 33.8 ° ~ 35.8 °, 53.5 ° ~ 56.5 °, 56.5 ° ~ 59.5 °, 14.8 ° ~ 16.2 °, 22.3 ° ~ 24.3 °, 32.2 ° ~ 34.2 °, 43.1 ° ~ 46.1 °, 46.2 ° ~ 49.2 ° and 62.7 ° ~ 66.7 ° has diffraction peak. |