| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2013-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_500d723f682396945886ffb17bf7288e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8572504a3970c655aa91e9730214b7b4 |
| publicationDate |
2013-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-103365112-A |
| titleOfInvention |
Exposure device and exposure method, and method for manufacturing pattern film |
| abstract |
The invention relates to an exposure device and an exposure method, and a method for manufacturing a pattern film. A first processing film (10A) is supported by using a supporting roll and transported. A mask (28) is arranged near the support roll, and light from a light source irradiates the first processing member (10A) across the mask. A plurality of slits (29) arranged along a width direction are formed on the mask (28). The mask (28) has a rectangular plate (28A), a mask film (28B) formed on one surface of the plate (28A) and a high refractive index layer (28C) formed on the mask film (28B). The high refractive index layer (28C) is formed by raw material which has transmissivity to light of the light source and has a refractive index higher than that of the material of the plate (28A). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105242502-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103941551-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103941551-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9429836-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104965239-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104965242-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105511220-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111123639-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111123639-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105511220-B |
| priorityDate |
2012-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |