http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103361644-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0338 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-067 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2013-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103361644-B |
| titleOfInvention | For etching the fluid composition of the multilayer film comprising copper and molybdenum and using its engraving method |
| abstract | The present invention is provided to etch the fluid composition for the multilayer film for including copper and molybdenum and use its engraving method.A kind of fluid composition, it is selected from least one of the group that is made up of ammonia, ammonium ion, amine and alkyl phosphate ion nitrogen compound supply source comprising (A) over cure acid ion supply source, (B) copper ion supply source and (C), and the pH of the fluid composition is 3.5~9. |
| priorityDate | 2012-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 127.