http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103327722-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate | 2013-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103327722-B |
| titleOfInvention | Dielectric impedance enhancement mode multi-electrode glow discharge low-temp plasma brush array generating means |
| abstract | The invention provides a kind of dielectric impedance enhancement mode multi-electrode glow discharge low-temp plasma brush array generating means, its structure comprises the gas discharge chamber prepared by insulating material, be attached to the dielectric barrier discharge plate electrode on the upper and lower two side of gas discharge chamber and two first kind glow-discharge electrode be arranged in the end walls of gas discharge chamber left and right for a pair, described gas discharge chamber has working gas import and plasma exit, the indoor part near plasma exit of gas discharge chamber is narrow slit structure, plasma exit is narrow slit shape, the cavity place of the narrow slit structure between two first kind glow-discharge electrode is also provided with at least one Equations of The Second Kind glow-discharge electrode, glow-discharge electrode pair is formed between every two adjacent glow-discharge electrode.The present invention compared to prior art, produces the plasma brush of more volume under can be implemented in lower puncture voltage and lower total power consumption, carry out fast effectively process to large area object.<!--1--> |
| priorityDate | 2013-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.