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filingDate 2013-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-103311279-B
titleOfInvention Semiconductor device and the method for manufacturing semiconductor device
abstract A kind of method the invention discloses semiconductor device and for manufacturing semiconductor device.First semiconductor region of the first conduction type is formed from the semiconductor substrate doped with the first dopant and the second dopant.First dopant and the second dopant are different materials and also different from semiconductor substrate.First dopant is electroactive and triggers the doping of the first conduction type in semiconductor substrate, and triggers being decreased or increased for the lattice parameter of the first semiconductor region of pure undoped p.Second dopant can for electroactive, and can be with the first dopant identical doping type, trigger one of the following or both:The hardening of the first semiconductor region;Respectively, reduce if the first dopant triggers, then the lattice parameter increase of the first semiconductor region of pure undoped p;If the first dopant triggers increase, then the lattice parameter of the first semiconductor region of pure undoped p reduces.
priorityDate 2012-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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