http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103298715-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G17-32 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G17-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B17-0025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27D3-0084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G17-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67706 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G19-00 |
| filingDate | 2011-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103298715-B |
| titleOfInvention | For finger driving device and the horizontal differential temperature profile method of IR Wafer processing apparatus belt conveyor |
| abstract | The present invention discloses a kind of New r4 work piece belt conveyor, comprises zero mass, few shade transport systems, and it is have to have pair of parallel, the lateral separation in definition process path, the transmission of removable chain, and its cording has and refers to give prominence to towards process path Central Line crosscut.Interstitial row between referring to removes belt conveyor pipe/bar upholder, to improve wafer quality and to retain energy.Implement to comprise cloth linear chain, band and the cylinder chain that finger is fixed to transport.Referring to can be determined angle downwards so that the point of crossing of the bottom of work piece and lateral edges only with each fingering row point cantact.Refer to that single channel transmission implemented by chain for a pair; Relative point is referred to adding central authorities pair to laterally refers to that messenger chain can implement multi-channel system.The inventive method be included in passage shoulder to shoulder can the treatment temperature profile of framework out of the ordinary, it is based on region then region, up and down half, for the process elasticity of broadness.Stable lamp power can be provided to control for accurate temperature based on the lamp-voltage control system of new conv. |
| priorityDate | 2010-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.