http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103276365-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac31afbea1cbbb03498644721ffb4a62 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 |
| filingDate | 2013-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c89486b65b78137ac694dfe3723d523 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44b1ab6afaee99e66142a776bb98ff81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9e73f9f4bb3b12849318923547fa7b1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ca174aae36ff73be967365a403b493b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_caed53029d1ea2df140231b362edbe93 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d687bbcc0a8b633d6a8b5d84d435c56 |
| publicationDate | 2015-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103276365-B |
| titleOfInvention | Method for optimizing superconducting performance of niobium nitride film on silicon substrate by using buffer layer |
| abstract | The invention discloses a method for optimizing the superconducting performance of a niobium nitride film on a silicon substrate by using a buffer layer, comprising the following steps of: performing magnetron sputtering of a six nitrogen five niobium film on a high-resistance silicon substrate to serve as a buffer layer, and performing in-situ magnetron sputtering of a niobium nitride film in a vacuum chamber. According to the method, the six nitrogen five niobium film buffer layer is coated on the high-resistance silicon substrate through magnetron sputtering so that the superconducting performance of the niobium nitride film is obviously improved, and particularly, the performance of an ultra-thin film is more obviously improved. The method disclosed by the invention can also be expanded to improve the superconducting performance of the niobium nitride film on other substrates and is simple, easy and obvious in effect. |
| priorityDate | 2013-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.