http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103262653-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-233 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-22 |
filingDate | 2011-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a9531ba22c34083bbe0d64d3c78d099 |
publicationDate | 2013-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-103262653-A |
titleOfInvention | Device manufacturing method, and organic el device |
abstract | Device manufacture of the present invention has a substrate preparing step, a pixel electrode forming step, a photosensitive film forming step, a first portion exposure step, a second portion exposure step, and a development step. In the first portion exposure step, after performing the photosensitive film forming step, a first photomask is disposed to face the substrate, and a first portion of the photosensitive film is exposed through the first photomask. Furthermore, in the second portion exposure step, after performing the first portion exposure step or at the same time when performing the first portion exposure step, the second photomask is disposed to face the substrate, and a second portion of the photosensitive film is exposed through the second photomask, said second portion being at least partially different from the first portion. Then, in the second portion exposure step, the second photomask is disposed such that an end portion thereof overlaps an end portion of the first photomask, and the portion where the first photomask and the second photomask overlap each other is at a position that corresponds to electric wiring in the pixel electrode forming step. |
priorityDate | 2011-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.