http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103219420-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b411cd6064147765b3e6bd224f84bcda |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate | 2013-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db403625d9e89d5f39c8c6ffd25e38ec |
| publicationDate | 2013-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103219420-A |
| titleOfInvention | Method for preparing Cu-Zn-Sn-S film from four-element alloy target material |
| abstract | The invention discloses a method for preparing a Cu-Zn-Sn-S film from a four-element alloy target material. The four-element alloy target material is Cu2ZnSnS4. The method comprises the following steps of (1), heating a glass base bottom plate with a molybdenum layer deposited to the temperature of 300 to 400 DEG C, using a sputtering method, adjusting the sputtering power to be 30 to 200W, and sputtering the glass base bottom plate to obtain a first layer of film, wherein the surface of the first layer of film is lack of copper and rich in zinc; (2), adjusting the temperature of the glass base bottom plate to be 400 to 600 DEG C, using the sputtering method, adjusting the sputtering power to be 80 to 200 W, and sputtering the glass base bottom plate to obtain a second layer of film, wherein the surface of the second layer of film is rich in copper; and (3), adjusting the temperature of the glass base bottom plate to be 400 to 600 DEG C, using the sputtering method, adjusting the sputtering power to be 30 to 200 W, and sputtering the glass base bottom plate to obtain a third layer of film, wherein the surface of the third layer of film is lack of copper, and then the Cu-Zn-Sn-S film is obtained. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109023275-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109023275-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103515482-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104282804-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104282804-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108155256-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104846342-A |
| priorityDate | 2013-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.