Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-1425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14491 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-161 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-1051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-878 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1645 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N39-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14 |
filingDate |
2011-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_113b74e094d96abaa12f22a5a47dcd68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e62e76567769d4628a88b3477dd506eb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e67f797060bb93a0dbc2b8501289fb63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9199b70550dcdf6aef382b718bb055ff |
publicationDate |
2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-103210515-B |
titleOfInvention |
Electromechanical transducing device and manufacturing method thereof, and liquid droplet discharging head and liquid droplet discharging apparatus |
abstract |
A manufacturing method of an electromechanical transducing device includes forming a vibration plate on a substrate; forming a first electrode made of a metal on the vibration plate; forming a second electrode made of an electrically conductive oxide on the first electrode; coating a surface modification material and carrying out surface modification of only the first electrode; forming an electromechanical transducing film on the second electrode; and forming a third electrode made of an electrically conductive oxide on the electromechanical transducing film. |
priorityDate |
2010-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |