http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103208417-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b18fb7abe2cbf7c72028b1822bf199e |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate | 2013-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4407fc292c5f6174d74c90a09295ea7 |
| publicationDate | 2015-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103208417-B |
| titleOfInvention | Method for preparing copper zinc tin sulfur selenium thin film by using alloy rotary target material |
| abstract | The invention discloses a method for preparing a copper zinc tin sulfur selenium thin film by using an alloy rotary target material. The method comprises the following steps of: (1) heating a substrate on which a molybdenum layer is deposited until the temperature rises to 300 to 400 DEG C, regulating sputtering power to 30 to 200 W by using a sputtering method, and sputtering to obtain a first thin film, wherein the surface of the first thin film is in a copper-poor zinc-rich state; (2) regulating the temperature of the substrate to 400 to 600 DEG C, regulating the sputtering power to 80 to 200 W by using the sputtering method, and sputtering to obtain a second thin film, wherein the surface of the second thin film is in a copper-rich state; and (3) regulating the temperature of the substrate to 400 to 600 DEG C, regulating the sputtering power to 30 to 200 W by using the sputtering method, and sputtering to obtain a third thin film, wherein the surface of the second thin film is in a copper-poor state, so that the copper zinc tin sulfur selenium thin film is prepared. |
| priorityDate | 2013-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.