http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103186046-B

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
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filingDate 2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2015-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-103186046-B
titleOfInvention Photoacid generator and the photoresist comprising described photoacid generator
abstract A kind of photoacid generator, comprises the compound shown in formula (I):n wherein, each R in formula (I)n a h, F, C independentlyn 1-10 non-fluorinated organic group, Cn 1-10 fluorinated organic group, or the combination comprising the above-mentioned group of at least one, prerequisite is at least one Rn a f or Cn 1-10 fluorinated organic group, described Cn 1-10 fluoridize and optionally comprise O separately with non-fluorinated organic group, S, N or comprise the above-mentioned heteroatomic combination of at least one; Ln 1 be linking group, described linking group comprises and comprises O, the heteroatoms of S, N, F or comprise the above-mentioned heteroatomic combination of at least one; Gn + the salt of formula (II):n wherein in formula (II), X is S or I, each Rn 0 c independentlyn 1-30 alkyl, many rings or monocycle Cn 3-30 naphthenic base, many rings or monocycle Cn 4-30 aryl, or the combination comprising the above-mentioned group of at least one, prerequisite is each Rn 0 cn 6 at least one R during monocyclic aryln 0 be substituted, wherein when X is I, a is 2, X when being S, a to be 3, p be 0 or 1, q be the integer of 1-10.
priorityDate 2011-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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