http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103175837-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2bed4b4d247d7fe14cfd9610d22c463 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-958 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 |
| filingDate | 2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5517fa1964ede42235edab20ed23c00a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de80865375c103e9d1d0585d534bbb04 |
| publicationDate | 2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103175837-B |
| titleOfInvention | Method and device for detecting defect in matrix |
| abstract | The invention relates to a method and a device for detecting defect in a matrix. The detection method for defect in the matrix comprises the following steps: providing a detection light beam and a reference light beam; performing incidence of an incidence point of the detection light beam from a first surface of the matrix to reflection points corresponded to the incidence points one by one on a second surface along an optical detection path, taking collection of back scattering light generated by the detection light beam through each point of the optical detection path as a sample light beam corresponded to the point; respectively collecting the interference signals formed by mutually interfering each sample light beam and with the reference light beam to obtain light intensity information of the back scattering light of each point on the optical detection path, as well as the optical length information between points on the optical detection path; and then determining that whether the optical detection path exists the defects or not according to the light intensity information of the back scattering light of each point on the optical detection path. The detection method can correctly distinguish the defect types in the matrix, so that the correct rate for detecting the defect can be enhanced. |
| priorityDate | 2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 |
Total number of triples: 17.