http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103172071-B
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be2c55a9de09e08e3404c0a5a1ae4dc7 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-10 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-04 |
filingDate | 2013-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7aed52c11c545f9eae28bab47d6ef63b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b617186ded83a2dda96a8a6fee586e96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4eb6878d73d79bc13b8d8923ef7702fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d206163ec8f2f44d6ec80b12cc6fe49a |
publicationDate | 2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-103172071-B |
titleOfInvention | Device and method for preparing high-purity silane through disproportionation reactive distillation of trichlorosilane |
abstract | The invention relates to a device and a method for preparing high-purity silane through disproportionation reactive distillation of trichlorosilane. The method comprises a disproportionation reactive distillation process (A), a silicon tetrachloride absorption process (B), a fixed bed absorption process (C) and a product filling process (D). The method comprises the steps that: two-step disproportionation reaction is adopted, and the distillation separation action of a reactive distillation column is utilized to finally obtain a mixed gas of silane and dichlorosilane on a column top to be used as non-condensable gas of a condenser to be extracted, and a silicon tetrachloride product is obtained at a column bottom after reaction formation; a gaseous product which is recovered through a disproportionation reactive distillation column enters into a silicon tetrachloride absorption column, wherein the main ingredient of an absorbed gas is silane, an absorption liquid is filled into a silicon tetrachloride desorption column, the desorbed dichlorosilane is recovered on the column top, and the desorption liquid of the column reflows back to the silicon tetrachloride absorption tower; the absorbed gas is filled into a fixed bed to absorb so as to obtain a high-purity silane product; and the silane product is filled into a buffer tank under the pressurization condition. Technological equipment is simple, and the obtained silane product has high purity. |
priorityDate | 2013-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.