http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103172070-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 |
| filingDate | 2013-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103172070-B |
| titleOfInvention | Preparation method of polycrystalline silicon |
| abstract | The invention relates to a preparation method of polycrystalline silicon. The method comprises the following steps: (1) preparing zinc steam; (2) preparing trichlorosilane/silicon tetrachloride steam; (3) enabling the zinc steam and the trichlorosilane/silicon tetrachloride steam to perform chemical deposition reaction on the surface of a silicon core rod to generate solid-phase silicon and produce tail gas A; (4) lowering the temperature and separating the tail gas A to get tail gas B and liquid zinc chloride; (5) lowering the temperature and separating the tail gas B to get tail gas C and liquid trichlorosilane/silicon tetrachloride; (6) inputting the tail gas C and the silicon tetrachloride to an HCL absorption tower, and absorbing hydrogen chloride by spraying the silicon tetrachloride to get the silicon tetrachloride with the hydrogen chloride; (7) heating, resolving and separating the silicon tetrachloride with the hydrogen chloride to get the hydrogen chloride and the silicon tetrachloride; (8) enabling the hydrogen chloride to react with silicon powder to get the trichlorosilane/silicon tetrachloride after purification and separation; (9) repeating the steps (2)-(8); and (10) lowering the temperature of the silicon core rod after the diameter of the silicon core rod achieves 120-180mm to get the polycrystalline silicon. The preparation method disclosed by the invention is simple in process route and can realize continuous reaction. |
| priorityDate | 2013-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.