| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a438365e5f2f275b8964dfbaf6f2e234 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F17-00 |
| filingDate |
2009-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd928a619b167ffa89b0ea1a48e32dd1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9271c1146fdedd0fb08406f99b7b503 |
| publicationDate |
2015-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-103145766-B |
| titleOfInvention |
Heterozygous cyclopentadienyl transition metal precursors for the deposition of transition metal-containing films |
| abstract |
The present invention relates to methods and compositions for depositing films on one or more substrates comprising providing a reactor having at least one substrate disposed therein. At least one metal precursor is provided and at least partially deposited on the substrate to form a metal-containing film. Also disclosed are methods by forming heterozygous amidino- or guanidinocyclopentadienyl-containing transition metal precursors under synthetic conditions. |
| priorityDate |
2008-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |