| abstract |
The present invention relates to a kind of radiation sensitive resin composition, it contains ［ A ］ and has the construction unit (I) of the compound represented from following formula (1) and the polymer of construction unit (II) of compound represented from following formula (2), ［ B ］ produce acid body and ［ C ］ organic solvent.In formula (1), R 1 With the ring structure that the carbon atom constituting lactonic ring collectively forms carbon number 3～8.R 2 Organic group for fluorine atom, hydroxyl or carbon number 1～20.A is the integer of 0～6.When a is more than 2, multiple R 2 Can be identical or different, it is also possible to be combined with each other and form ring structure.Wherein, R 1 And R 2 In at least 1 group there is hetero atom or halogen atom. |