http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103117287-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-20 |
| filingDate | 2013-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103117287-B |
| titleOfInvention | Non-brake method film-type infrared focal plane array seeker structure and preparation method thereof |
| abstract | Non-brake method film-type infrared focal plane array seeker structure, comprise the first substrate containing reading circuit, the second substrate of microbridge array and responsive element array is isolated containing heat, described first substrate and the second substrate are bonded to one, each heat isolation microbridge unit in described heat isolation microbridge array with the second substrate after etching for bridge pier, with the supporting layer of combining closely with described bridge pier end face for bridge floor; The bridge floor of each heat isolation microbridge unit is provided with responsive element array, and each responsive element array realizes being electrically connected by the reading circuit that lead-in wire electrode is corresponding with on the first substrate.Preparation method: the preparation of the first substrate bonding face figure; Prepared by supporting layer; The preparation of responsive element array; Second substrate front protecting; The preparation of heat isolation microbridge array; The bonding of the first substrate and the second substrate; Remove the front protecting layer of the second substrate; The connection of responsive first electrode reading circuit electrode. |
| priorityDate | 2013-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.