| abstract |
The present invention relates to the surface treatment method of fluid product partitioning device.The method comprises with multi-charge and the ionic fluid of multi-energy by the step of implanted ions at least one pending modifying surface at least partially of described equipment, and the described pending list mask of modification has friction resistant performance.Described multiplycharged ion is selected from helium (He), nitrogen (N), oxygen (O), neon (Ne), argon (Ar), krypton (Kr), xenon (Xe), and implanted ions proceeds to the degree of depth of 0 to 3 μm. |