http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103094361-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66181 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-94 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2011-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103094361-B |
| titleOfInvention | PIS capacitor in a kind of SiGe HBT technique and manufacture method thereof |
| abstract | Do you the invention discloses a kind of SiGe? PIS capacitor in HBT technique, comprise: silicon substrate, shallow trench isolation from, P trap, P type heavily doped region, oxide layer, germanium silicon epitaxial layer, isolation side walls, contact hole and metal wire, described silicon substrate has shallow trench isolation from P trap, described P trap has P type heavily doped region, described shallow trench isolation from P trap, P type heavily doped region is adjacent, described P type heavily doped region has oxide layer, described oxide layer has germanium silicon epitaxial layer, described isolation side walls and oxide layer, germanium silicon epitaxial layer is adjacent, described P trap and germanium silicon epitaxial layer draw the two ends of connection metal line as capacitor by contact hole.The invention also discloses the manufacture method of described PIS capacitor.Do PIS capacitor of the present invention and manufacture method thereof break SiGe? the limitation of PIS electric capacity dependency structure is not had in HBT technique, make SiGe? HBT technique increases a kind of device and selects. |
| priorityDate | 2011-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.