http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103087087-B
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0275 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 |
filingDate | 2011-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-103087087-B |
titleOfInvention | Containing the soft template of sulfydryl multi-functional low power multi-polysiloxane compound and composition and impression |
abstract | The invention provides shown in a kind of general formula (1) containing sulfydryl multi-functional low power multi-polysiloxane compound and for the preparation of the composition of soft template of impression and imprint process, (SiOn 1.5 rn 1 ) m (SiOn 1.5 cHn 2 cHn 2 cHn 2 sRn 2 ) n? (1) wherein Rn 1 for-CHn 2 -CHn 2 -CHn 2 -SH, m represent the integer of 3 ~ 12; Rn 2 be respectively without the alkyl replaced or be substituted with a substituent, without the alkoxyl group replaced or be substituted with a substituent, without the ester group replaced or be substituted with a substituent with without the aromatic base replaced or be substituted with a substituent, described substituting group is halogen, and n represents the integer of 1 ~ 12; Said composition is a kind of high hydrophobic photoresist material, is applied in the preparation of nano-imprint stamp, can obtain high-precision structure, improves template repeating utilization factor. |
priorityDate | 2011-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 93.