http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103064263-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 2012-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0b99c12022f7409d4113b54cea8bcd7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a45868feafc870dc7c6c853310ded32f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_518b6d1de682b85477114f462c65a83c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_675371b1c7af7c068da26f78356bd092 |
| publicationDate | 2015-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103064263-B |
| titleOfInvention | Resist stripper composition and method of stripping resist using same |
| abstract | The invention relates to a resist stripper composition and a method of stripping resist using the same. The resist stripper composition includes (a) polyhedral silsesquioxane and (b) alkali compound. The resist stripper composition can excellently remove patterns and dry and wet etching residues, and the resist stripper composition can excellently prevent corrosion of a metal wire containing aluminum or copper, and has the excellent stripping performance to the stripper. The color change of the stripper can be easily observed, so the resist stripper composition can be applied to the fine-pattern flat display device manufacturing technology to realize the high resolution and the copper wire flat display device manufacturing technology. |
| priorityDate | 2011-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 158.