http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103058126-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate | 2012-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103058126-B |
| titleOfInvention | A kind of processing method of three-dimensional quartz micro mechanical structure surface electrode |
| abstract | The present invention relates to quartz micro mechanical processing technique field, specifically relate to a kind of processing method of three-dimensional quartz micro mechanical structure surface electrode.The metallic film surface of cleaning three-dimensional quartz micro mechanical structure; In metallic film surface after cleaning, glue spraying obtains photoresist layer, then exposes photoresist layer, develops, and finally carries out the post bake of photoresist layer; Adopt photoresist layer to make mask, by the method for chemical attack, metal film is corroded, then remove photoresist layer, complete the processing of three-dimensional micro mechanical structure surface electrode.Glue spraying can be carried out to the wafer of different size and shape, also can carry out uniform gluing to the three-dimensional quartz micro mechanical structure sidewall of large depth-to-width ratio simultaneously; By ullrasonic spraying formula glue spraying, improve the uniformity of photoresist layer on three-dimensional micro mechanical structure.By increasing ultrasonic cleaning link in development step, reducing the adhesiveness of photoresist layer to three-dimensional quartz micro mechanical structure base material, having stopped short-circuit conditions during electrode machining. |
| priorityDate | 2012-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.