http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103021773-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2012-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-103021773-B |
| titleOfInvention | Porous composite ceramics parts, its preparation method and plasma process chamber |
| abstract | The invention provides a kind of porous composite ceramics parts for plasma process chamber, its preparation method and plasma process chamber.Prepare the method for porous composite ceramics parts, comprising: the fluid of preparation containing yttrium; Fluid containing yttrium is infiltrated in the micropore of porous ceramic matrix surface; Through Overheating Treatment and/or plasma Ageing Treatment, fill in the whole surface and micropore of porous ceramic matrices suitable containing yttrium compound, form the porous composite ceramics parts be filled with containing yttrium compound; By machining processes remove porous composite ceramics parts surface unnecessary containing yttrium compound, until porous composite ceramics parts surface is level and smooth.The present invention by being formed containing yttrium compound in the surface and micropore of porous composite ceramics parts, effectively improve the resistance to corrosion of porous composite ceramics parts plasma, improve the technology stability of plasma process chamber, and increase the service life, and reach Simplified flowsheet and cost-saving object. |
| priorityDate | 2012-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.