| abstract |
A molecular glass compound comprises a tetramer reaction product of an aromatic compound of formula (I) and a polycyclic or fused polycyclic aromatic aldehyde of formula (II), wherein in the formula (I) of C6R1x (OR2)y, R1 is H, F, C1-20 alkyl, C1-20 halide alkyl, C6-20 aryl, C6-20 halide aryl, C7-20 aryl alkyl or C7-20 halide aryl alkyl, R2 is H, C1-20 alkyl, C1-20 halide alkyl, x is 6-y and y is 2 or 3, at least one of the OR2 groups is hydroxyl group, and at least two of the OR2 groups are mutually arranged on the meta positions; in the formula (II) of Ar1-CHO, the Ar1 is a substituted, halogen substituted or unsubstituted C4-20 heterocyclic group containing aromatic group, or a substituted, halogen substituted or unsubstituted C8-20 fused polycyclic aromatic part; an acid removable protection group used as adduct with the hydroxyl group of the aromatic compound, the hydroxyl group of the polycyclic or fused polycyclic aromatic aldehyde or the combination containing one of the above two kinds of the hydroxyl groups. The invention also discloses a photoresist containing the molecular glass compound. The invention also discloses a coated substrate, wherein the coated substrate comprises (a) one or several layers of substrate to be formed with patterns on the surface; and (b) a photoresist composite layer arranged on the one or several layers of the substrate to be formed with patterns. |