http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102998088-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-10 |
| filingDate | 2012-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102998088-B |
| titleOfInvention | A kind of calibration device of ultra-far ultraviolet source |
| abstract | The invention provides a kind of calibration device of ultra-far ultraviolet source, comprise light source, converge pendulum mirror unit, ultraviolet monochromatic instrument unit, detector cells and pressure differential subdivision.Wherein, converge pendulum mirror unit and comprise a convergence pendulum mirror, it comprises pendulum mirror and swing offset platform, pendulum mirror is the concave mirror of two pieces of non-reflecting surface laminatings, its mirror center dead in line, wherein the reflecting surface A of one piece of catoptron plates 30nm ~ 200nm reflectance coating, and the reflecting surface B of another block catoptron plates 60nm ~ 200nm reflectance coating.Utilize the present invention can realize 30nm ~ 200nm scope inner light source spectral radiance parametric calibration.Whole device volume provided by the invention is small and exquisite, rich interface, extreme ultraviolet and the calibration of far ultraviolet radiation degree and elimination senior sub-spectrum has unique design, improves the precision of extreme ultraviolet and far ultraviolet radiation calibration. |
| priorityDate | 2012-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23736 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408225156 |
Total number of triples: 12.