http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102981271-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0b8702be9f81148adcf5701f83355149 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate | 2012-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0df4c4413cd862e439366b7db2d8f67e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3376cd6e8111c357c2de302bb129c315 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94d4b93e4163384b4be51538256d0608 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6ec0afe9d77d47c6ca1340abc338fbc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b48552c1a3dbba3d856e40614e138abe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ab33917fa6063ee5bf34bfcd92c87ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a57215884e4df86df15fab715e508426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e823ee55c09b96a95acbd8eb3d3a01a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c76fd0cbc1e13f80c4b956b95c76b86 |
| publicationDate | 2015-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102981271-B |
| titleOfInvention | Manufacturing method of electrostatic-driven micro-electro-mechanical system (MEMS) deformable mirror with large-stroke structure |
| abstract | The invention discloses a manufacturing method of an electrostatic-driven micro-electro-mechanical system (MEMS) deformable mirror with a large-stroke structure. Based on a silicon surface processing technology, an electroplating technology and a wet etching and chemical polishing technology, by adding a stroke cavity on a silicon substrate, by utilizing optical resist or polymide or other substance as a sacrificial layer, by utilizing the electroplating technology to manufacture the structure of the deformable mirror, and by utilizing the mechanical polishing method to grind solidified optical resist and an electroplating layer, the MEMS deformable mirror which is provided with the large-stroke structure and has good performance can be manufactured. By adding the stroke cavity on the silicon substrate and arranging a bottom electrode and a guiding wire at the bottom of the stroke cavity, under the condition that manufacturing difficulty of the sacrificial layer is not increased, initial space between an upper electrode and the bottom electrode of the deformable mirror can be effectively increased, and effective stroke of the deformable mirror can be improved. |
| priorityDate | 2012-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 22.