http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102955187-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2003-1213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0384 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-201 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02366 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02327 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J1-0488 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-285 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 |
| filingDate | 2012-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102955187-B |
| titleOfInvention | Incline structure body, the manufacture method of incline structure body and spectroscopic sensor |
| abstract | The present invention relates to incline structure body, the manufacture method of incline structure body and spectroscopic sensor.The manufacture method of described incline structure body includes: operation (a), is formed over expendable film at substrate；Operation (b), form the first film, described first film includes and the Part I that substrate is connected, the Part II above expendable film, the Part III between Part I and Part II, and a part for Part III or in the boundary portion office of Part II and Part III, has the region that thickness compared with Part I is relatively thin；Operation (c), removes expendable film；Operation (d), after operation (c), makes the first film bending, and makes the Part II of the first film tilt relative to substrate at the region place that thickness is relatively thin. |
| priorityDate | 2011-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.