http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102872531-B
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9de52bba13e16028dffa8775e3f3f28 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61N1-30 |
filingDate | 2011-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2014-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d24109abb75cb164fa99b7e5245f63ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3d693bd8c3d9ca5a0b1723b3df56db0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69e4c23e402f14628b002c95051c6755 |
publicationDate | 2014-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-102872531-B |
titleOfInvention | Preparation method of electric osmosis driving unit of electric osmosis current controllable medicine conveying chip |
abstract | The invention provides a preparation method of an electric osmosis driving unit of an electric osmosis current controllable medicine conveying chip. The method comprises the following steps of: (1) oxidizing one side of a silicon wafer to form a silicon dioxide layer and carrying out whirl coating photoetching on the other side of the silicon wafer; and (2) photoetching a chip to form four deep channels, and finally, packaging the whole chip. The production process of the chip is simple, the production cost is low, and the chip is easily produced in a large scale; and the designed chip can realize extremely-low voltage direct current (DC) drive; and a medicine output amount is tiny, stable and controllable, and liquid electrolysis and a large amount of joule heat are not generated. |
priorityDate | 2011-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.