http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102867736-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68368 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate | 2003-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102867736-B |
| titleOfInvention | The method of the method for laminate layer transfer and manufacture semiconductor devices |
| abstract | Name of the present invention is called the method for laminate layer transfer and manufactures the method for semiconductor devices, its objective is a kind of method that provides at short notice object to be peeled off is transferred on transfering part and object to be peeled off in lamination is not caused damage. And another object of the present invention is to provide a kind of method of manufacturing semiconductor devices, wherein, the semiconductor element being manufactured on substrate is transferred to transfering part, typically says in plastic supporting base. The method is characterised in that and comprises: on substrate, form peel ply and object to be peeled off; By two-sided tape bonding object to be peeled off and bearing; Peel off object to be peeled off with physical method from peel ply, then object to be peeled off is bonded on transfering part; And peel off bearing and two-sided tape from object to be peeled off. |
| priorityDate | 2002-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.