http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102759635-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6a6f422b091ba12ea61d4adbf1b0e8e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-093 |
| filingDate | 2012-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_409c39329e4642294e35ed46792e13a7 |
| publicationDate | 2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102759635-B |
| titleOfInvention | Micro-optical acceleration sensor integrated with grating piezoelectric modulation and detection method thereof |
| abstract | The invention discloses a micro-optical acceleration sensor integrated with grating piezoelectric modulation and a detection method of the micro-optical acceleration sensor. The micro-optical acceleration sensor comprises a shell; light sources and gratings are sequentially arranged in the shell along a light path; a base, an MEMS (Micro-electromechanical System) sensing mechanism and a piezoelectric ceramic part are also arranged in the shell along the light path, wherein the MEMS sensing mechanism is arranged between the base and the gratings and is arranged in the shell in a sliding manner, the piezoelectric ceramic part is arranged between the grating and the MEMS sensing mechanism, and one surface of the piezoelectric ceramic part is fixed on the gratings; the MEMS sensing mechanism comprises a mass block and a cantilever beam connected with the mass block; and one surface of the mass block facing the gratings is a reflecting surface plated with a metallic aluminium film. The micro-optical acceleration sensor has the advantages that as the piezoelectric ceramic part is introduced as a modulator, the detection sensitivity of the sensor can be greatly increased; and by detecting two diffraction light intensity signals with different orders and adopting phase locking amplification and differential treatment, the circuit noise is reduced, and the measurement accuracy of a system is increased. |
| priorityDate | 2012-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268 |
Total number of triples: 13.