http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102755976-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2008-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102755976-B |
| titleOfInvention | Substrate cleaning chamber and clean and control method |
| abstract | Board cleaning chamber comprises the profile top electrode with arcuate surface, described arcuate surface is in the face of substrate support and have variable tranverse sectional thickness, provides well the variable plasma density across substrate support with the gap length changing between arcuate surface and substrate support. The dielectric collar of clean room comprise bottom, spine and covered substrate support member peripheral lip radially to internal frame portion. Bottom baffle comprises the circular discs with at least one peripheral wall. Describe the clean of clean room simultaneously and regulated processing. |
| priorityDate | 2007-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.