| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate |
2011-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e052a8a6fb8873e304b59a64a792b33f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93b01bcb5396d87eab38a2b1c71b117a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_050440a29423592d516e200f9e73e692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31c3d0baa1b03205adaa50c04d513cb8 |
| publicationDate |
2014-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-102753724-B |
| titleOfInvention |
Material for forming ruthenium film and method for forming ruthenium film |
| abstract |
Disclosed is a material for forming a ruthenium film, which is easily decomposed in the absence of an oxidizing agent such as oxygen. Specifically disclosed is a material for forming a ruthenium film, which contains a compound represented by formula (1). Ru(PR1 3)l(L1)m(L2)n (1) (In formula (1), R1s each independently represents a hydrogen atom, a halogen atom, a hydrocarbon group having 1-4 carbon atoms or a halogenated hydrocarbon group having 1-4 carbon atoms; L1 represents a hydrogen atom or a halogen atom; L2 represents an unsaturated hydrocarbon compound having at least two double bonds and 4-10 carbon atoms; l represents an integer of 1-5; m represents an integer of 0-4; and n represents an integer of 0-2. In this connection, l m 2n is 5 or 6). |
| priorityDate |
2010-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |