http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102723264-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2011-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102723264-B |
| titleOfInvention | There is the preparation method of nano-micro structure substrate |
| abstract | The present invention relates to a kind of preparation method with nano-micro structure substrate, it comprises the following steps: provide a substrate, and this substrate has the epitaxial growth plane of a support outer layer growth; In the epitaxial growth plane of described substrate, one carbon nanotube layer is set; At the epitaxial growth plane grown epitaxial layer of substrate; Stripping removes substrate and carbon nanotube layer, obtains having nano-micro structure substrate.Described preparation method's technique with nano-micro structure substrate is simple, with low cost. |
| priorityDate | 2011-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.