| abstract |
A copolymer has the formula: wherein R1 -R5 are each independently H, C1-6 alkyl, or C4-6 aryl, R6 is a fluorinated or non-fluorinated C5-30 acid decomposable group; each Ar is independently a monocyclic, polycyclic, or fused polycyclic C6-20 aryl group; each of R7 and R8 is independently -OR11 or a - C(CF3)2OR11 group where each occurrence of R11 is independently H, a fluorinated or non-fluorinated C5-30 acid decomposable group, or a combination of these; each R9 is independently F, a C1-10 alkyl, C1-10 fluoroalkyl, C1-10 alkoxy, or a C1-10 fluoroalkoxy group; R10 is a cation-bound C10-40 photoacid generator-containing group, mole fractions a, b, and d are independently 0 to 0.80, mole fraction c is 0.01 to 0.80, e is 0 to 0.50 provided that where a, b, and d are 0, e is greater than 0, the sum of the mole fractions a+b+c+d+e is 1, 1 and m are independently integers of 1 to 4, and n is an integer of 0 to 5. A photoresist, and a coated substrate, each also include the copolymer. |