http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102709139-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_53b4d53983adbf56dd0e7d0bf96f8ce5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-26 |
| filingDate | 2012-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d93e6373fd040021716323457b4f5ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a50f47dbac341815c375f538a54c71b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20327d105e0fe1fc850de0a1f97d6adf |
| publicationDate | 2014-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102709139-B |
| titleOfInvention | Field emission ion source for outputting monatomic hydrogen ion beam |
| abstract | The invention provides a field emission ion source for outputting a monatomic hydrogen ion beam, belonging to the technical field of a small specific ion source. The field emission ion source mainly comprises a field emission array, a foam metal active thin board and an acceleration electrode. The foam metal active thin board is placed on the field emission array after being isolated through an insulating material; the surface of the foam metal active thin board is parallel to the surface of the field emission array; and the acceleration electrode is placed on the foam metal active thin board. When the field emission ion source works, the working voltage of the field emission array is less than 1kV, so that the electric field on a tip surface is 15-20V/nm. The foam metal active thin board is externally connected with low-voltage power supply about minus 700V relative to the upper surface of the field emission array, and the acceleration electrode is externally connected with high-voltage pulse power supply more than minus 10kV relative to the foam metal active thin board. With the adoption of the field emission ion source provided by the invention, the hydrogen (including isotopic deuterium or tritium) atomic ion beam with a high ratio can be output from the acceleration electrode, the working voltage of the field emission array is reduced, so that the field emission array is prevented from being burnt. |
| priorityDate | 2012-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.