http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102683148-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32577 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2012-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef7bd88aab82862235992d1ea6865947 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a687542562c0fe1ea14dc99aa0ec98fc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9958a499d020b3cfd8e328a86574f16f |
| publicationDate | 2015-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102683148-B |
| titleOfInvention | Plasma processing apparatus |
| abstract | The present invention provides a plasma processing apparatus capable of more finely controlling plasma compared to a conventional plasma processing apparatus. The plasma processing apparatus includes: a first ground member provided in processing chamber in such a way that at least a portion of the first ground member is exposed to a processing space, wherein the first ground member forms a ground potential; a second ground member provided in an exhaust space of the processing chamber to face the first ground member in such a way that at least a portion of the second ground member is exposed to the exhaust space, wherein the second ground member forms a ground potential; and a ground rod that moves up and down between the first and second ground members and contacts any one of the first or second ground member to adjust a ground state of the first or second ground member. |
| priorityDate | 2011-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804 |
Total number of triples: 21.