http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102645455-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac31afbea1cbbb03498644721ffb4a62 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-50 |
| filingDate | 2012-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5ba99b3ba879a821e515d2fce251d82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b63dec59153e674c825a5caaf6838c6b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fd13378f78265478f6e8b663dd99ffd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8116e660a3f504edbdc52d767394f454 |
| publicationDate | 2014-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102645455-B |
| titleOfInvention | Preparation method for sensitive humidity sensor material |
| abstract | The invention relates to a preparation method for a sensitive humidity sensor material. The method utilizes swelled mesoporous segmented copolymer as a template and the atomic layer deposition (ALD) technology to prepare a three-dimensional mesoporous oxide film, and thereby a humidity sensor with high sensitivity can be prepared. The preparation method mainly includes the following specific steps: (1) after the microphase separation and selective solvent swelling of the amphiphilic segmented copolymer, the organic template with a three-dimensional network-like porous structure is prepared; (2) the swelled mesoporous organic template is placed in a reaction chamber, and metal source precursor, nitrogen, vapor and oxidation precursor are sequentially filled into the reaction chamber; (3) the frequency of deposition cycle is regulated to accurately control the thickness of a deposit layer; (4) after ALD, the organic template is roasted to be removed under high temperature, and thereby the three-dimensional mesoporous oxide film is prepared. The process of the preparation method is simple and highly controllable. |
| priorityDate | 2012-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.