http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102645294-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eda37409f26cb8e833ba67f2b1bc1fd5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-08 |
| filingDate | 2012-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_923332da98e5ad9e99c85fdfb6d79f0e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcb2ca91e7686de2932cde8b8c31e9fb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d7d4adf2ae9160b6618207edfa73f86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73b07e8f7afe146ee36b3739601cd97f |
| publicationDate | 2013-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102645294-B |
| titleOfInvention | Pressure sensor chip based on ZnO nanoline array, and manufacturing method of pressure sensor chip |
| abstract | The invention provides a pressure sensor chip based on a ZnO nanoline array and a manufacturing method of the pressure sensor chip. The ZnO nanoline is adopted as a piezoelectric element of a pressure sensor for the chip; the mechanical energy is converted into electric signals by using the piezoelectric effect of the ZnO so as to achieve the purpose of pressure detection; as the ZnO nanoline is used as the piezoelectric element, compared with ordinary piezoelectric elements, the process from accumulation to release can be realized by using the piezoelectric effect of the ZnO nanoline and the Schottky contact of semiconductors and metals, so that high impedance output amplifying circuits desired by the ordinary piezoelectric elements are unnecessary; in addition, the piezoelectric pressure sensor can be further minimized by synchronizing a nano-scale structure of high quality. |
| priorityDate | 2012-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.