http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102612731-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-022 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3174 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate | 2010-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102612731-B |
| titleOfInvention | For removing the method and apparatus of residue from ion source component |
| abstract | Technology disclosed herein contributes to removing residue from molecular beam component.Such as, in illustrative methods, provide molecular beam along beam path, residue is produced in molecular beam component.In order to reduce residue, molecular beam component is exposed to hydro-fluorocarbon plasma.According to the exposure whether meeting the first predetermined condition to terminate to hydro-fluorocarbon plasma, what the first predetermined condition represented residue removes degree.Other method and system is also disclosed simultaneously. |
| priorityDate | 2009-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.