http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102598220-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0361 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00849 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate | 2010-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102598220-B |
| titleOfInvention | For suppressing the treatment fluid of the pattern collapse of metal superfine structure and using its manufacture method of metal superfine structure |
| abstract | The treatment fluid of the pattern collapse for suppressing metal superfine structure containing at least one be selected from the group that is made up of the ammonium halide with fluoroalkyl, the betaine compound with fluoroalkyl and the amine oxide compounds with fluoroalkyl and use the manufacture method of metal superfine structure of this treatment fluid. |
| priorityDate | 2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.